TY - GEN
AU - Zhao, Y.
AU - Zuo, Dun Wen
AU - Sun, Yu Li
TI - Status and Trends of Fixed Abrasive Polishing on Semiconductor
PB - Trans Tech Publications, Ltd.
SN - 1662-9795
KW - Mechanical Engineering
KW - Mechanics of Materials
KW - General Materials Science
PY - 2012
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -
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