author = { Rane, Gayatri K. AND Menzel, Siegfried AND Gemming, Thomas AND Eckert, Jürgen },

title = { Microstructure, electrical resistivity and stresses in sputter deposited W and Mo films and the influence of the interface on bilayer properties },

publisher = {Elsevier BV},

isbn = {0040-6090},

keywords = { Materials Chemistry , Metals and Alloys , Surfaces, Coatings and Films , Surfaces and Interfaces , Electronic, Optical and Magnetic Materials },

year = {2014},

url = { http://slubdd.de/katalog?TN_libero_mab2 }