author = { Sakamoto, Shintaro AND Tanaka, Kouetsu },

title = { Filter Leak Tester for Semiconductor/LCD Clean Rooms },

publisher = {International Association for Automation and Robotics in Construction (IAARC)},

isbn = {2413-5844},

year = {2006},

url = { http://slubdd.de/katalog?TN_libero_mab2 }