author = { Brachmann, Erik AND Seifert, Marietta AND Oswald, Steffen AND Menzel, Siegfried AND Gemming, Thomas },

title = { Evaluation of Surface Cleaning Procedures for CTGS Substrates for SAW Technology with XPS },

publisher = {MDPI AG},

isbn = {1996-1944},

keywords = { General Materials Science },

year = {2017},

url = { http://slubdd.de/katalog?TN_libero_mab2 }