%0 Generic
%T Microfabrication and precision engineering research and development
%A Davim, J. Paulo
%I Woodhead Publishing
%@ 9780857094865
%@ 0857094866
%K Production engineering
%K Microtechnology
%K Nanotechnology
%K Electronic books ; local
%K Electronic books
%D [2017]
%D , ©2017
%X Includes bibliographical references and index. - Description based on online resource; title from title page (viewed January 4, 2017)
%C Woodhead Publishing
%C Duxford, United Kingdom ;
%U http://slubdd.de/katalog?TN_libero_mab2
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