%0 Generic
%T Evaluation of Surface Cleaning Procedures for CTGS Substrates for SAW Technology with XPS
%A Brachmann, Erik
%A Seifert, Marietta
%A Oswald, Steffen
%A Menzel, Siegfried
%A Gemming, Thomas
%I MDPI AG
%@ 1996-1944
%K General Materials Science
%D 2017
%C MDPI AG
%U http://slubdd.de/katalog?TN_libero_mab2
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