%0 Generic
%T Silicon Carbide and Related Materials 2005: High Temperature Annealing Study of Al2O3 Deposited by ALCVD on n-Type 4H-SiC
%A Avice, Marc
%A Grossner, Ulrike
%A Nilsen, Ola
%A Christensen, Jens S.
%A Fjellvåg, Helmer
%A Svensson, B.G.
%I Trans Tech Publications Ltd.
%@ 0255-5476
%D 2006
%C Trans Tech Publications Ltd.
%U http://slubdd.de/katalog?TN_libero_mab2
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