author = { Ohmori, Hitoshi },

title = { Electrolytic in-process dressing (ELID) technologies fundamentals and applications },

publisher = {CRC Press},

isbn = {9781439800362},

isbn = {1439800367},

keywords = { Semiconductor wafers Finishing , Semiconductors Polishing , Electrolytic grinding },

year = {c 2011},

abstract = {Includes bibliographical references and index},

address = { Boca Raton, Fla. [u.a.] },

url = { http://slubdd.de/katalog?TN_libero_mab2 }