%0 Book
%T Integrated microsystems electronics, photonics, and biotechnology
%A Iniewski, Krzysztof
%I CRC Press
%@ 9781439836200
%K Microelectromechanical systems
%K Integrated optics
%K Mikrosystemtechnik
%D c 2012
%X Includes bibliographical references and index
%C CRC Press
%C Boca Raton, Fla. [u.a.]
%U http://slubdd.de/katalog?TN_libero_mab2
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