TY -
BOOK
AU - Iniewski, Krzysztof
TI -
Integrated microsystems
electronics, photonics, and biotechnology
PB - CRC Press
SN - 9781439836200
KW - Microelectromechanical systems
KW - Integrated optics
KW - Mikrosystemtechnik
PY - c 2012
N2 - Includes bibliographical references and index
BT - Devices, circuits, and systems
CY - Boca Raton, Fla. [u.a.]
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -