%0 Generic
%T In situ dc oxygen-discharge cleaning system for optical elements
%A Koide, Tsuneharu
%A Shidara, Tetsuo
%A Tanaka, Kenichiro
%A Yagishita, Akira
%A Sato, Shigeru
%I AIP Publishing
%@ 0034-6748
%@ 1089-7623
%K Instrumentation
%D 1989
%C AIP Publishing
%U http://slubdd.de/katalog?TN_libero_mab2
Download citation