author = { Ma, Zhu AND Pan, Tianhong },

title = { Distributional reinforcement learning for run-to-run control in semiconductor manufacturing processes },

publisher = {Springer Science and Business Media LLC},

isbn = {0941-0643},

isbn = {1433-3058},

keywords = { Artificial Intelligence , Software },

year = {2023},

url = { http://slubdd.de/katalog?TN_libero_mab2 }