%0 Generic
%T Surface gradient integrated profiler for X-ray and EUV optics
%A Higashi, Yasuo
%A Takaie, Yuichi
%A Endo, Katsuyoshii
%A Kume, Tatsuya
%A Enami, Kazuhiro
%A Yamauchi, Kazuhiro
%A Yamamura, Kazuya
%A Yamauchi, Kazutoi
%A Sano, Yasuhisa
%A Ueno, Kenji
%A Mori, Yuzo
%I Informa UK Limited
%@ 1878-5514
%@ 1468-6996
%K General Materials Science
%D 2007
%C Informa UK Limited
%U http://slubdd.de/katalog?TN_libero_mab2
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