%0 Generic
%T Effect of the carbon ion energy on the microstructure of ta-C/Cr multilayers
%A Ratayski, Ulrike
%A Rafaja, David
%A Klemm, Volker
%A Mühle, Uwe
%A Leonhardt, Michael
%A Scheibe, Hans-Joachim
%I Elsevier BV
%@ 0257-8972
%K Materials Chemistry
%K Surfaces, Coatings and Films
%K Surfaces and Interfaces
%K Condensed Matter Physics
%K General Chemistry
%D 2011
%C Elsevier BV
%U http://slubdd.de/katalog?TN_libero_mab2
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