TY - GEN
AU - El Kazzi, Salim
AU - Lum, Ya Woon
AU - Erofeev, Ivan
AU - Vajandar, Saumitra
AU - Pasko, Sergej
AU - Krotkus, Simonas
AU - Conran, Ben
AU - Whear, Oliver
AU - Osipowicz, Thomas
AU - Mirsaidov, Utkur
TI - Assessing Ultrathin Wafer-Scale WS2 as a Diffusion Barrier for Cu Interconnects
PB - American Chemical Society (ACS)
SN - 2637-6113
KW - Materials Chemistry
KW - Electrochemistry
KW - Electronic, Optical and Magnetic Materials
PY - 2023
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -
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