TY - GEN
AU - Cancellieri, Claudia
AU - Klyatskina, Elizaveta
AU - Chiodi, Mirco
AU - Janczak-Rusch, Jolanta
AU - Jeurgens, Lars
TI - The Effect of Interfacial Ge and RF-Bias on the Microstructure and Stress Evolution upon Annealing of Ag/AlN Multilayers
PB - MDPI AG
SN - 2076-3417
KW - Fluid Flow and Transfer Processes
KW - Computer Science Applications
KW - Process Chemistry and Technology
KW - General Engineering
KW - Instrumentation
KW - General Materials Science
PY - 2018
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -
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