TY - GEN
AU - Neubert, Holger
AU - Partsch, Uwe
AU - Fleischer, Daniel
AU - Gruchow, Mathias
AU - Kamusella, Alfred
AU - Pham, The-Quan
TI - Thick Film Accelerometers in LTCC Technology—Design Optimization, Fabrication, and Characterization
PB - IMAPS - International Microelectronics Assembly and Packaging Society
SN - 1551-4897
KW - Electrical and Electronic Engineering
KW - Computer Networks and Communications
KW - Electronic, Optical and Magnetic Materials
PY - 2008
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -
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