author = { Kocher, Matthias AND Schlichting, Holger AND Kallinger, Birgit AND Rommel, Mathias AND Bauer, Anton J. AND Erlbacher, Tobias },

title = { Influence of Shallow Pits and Device Design of 4H-SiC VDMOS Transistors on In-Line Defect Analysis by Photoluminescence and Differential Interference Contrast Mapping },

publisher = {Trans Tech Publications, Ltd.},

isbn = {1662-9752},

keywords = { Mechanical Engineering , Mechanics of Materials , Condensed Matter Physics , General Materials Science },

year = {2020},

url = { http://slubdd.de/katalog?TN_libero_mab2 }