TY - GEN
AU - Gross, Heinz
AU - Müller, Theo
AU - Wildhaber, Ivo
AU - Winkler, Hanspeter
TI - High resolution metal replication, quantified by image processing of periodic test specimens
PB - Elsevier BV
SN - 0304-3991
KW - Instrumentation
KW - Atomic and Molecular Physics, and Optics
KW - Electronic, Optical and Magnetic Materials
PY - 1985
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -
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