@book {TN_libero_mab2,
author = { Güttler, Dominik },
title = { An investigation of target poisoning during reactive magnetron sputtering },
publisher = {Forschungszentrum Dresden-Rossendorf},
keywords = { Hochschulschrift , Forschungsbericht },
year = {2009},
booktitle = {Wissenschaftlich-technische Berichte / FZD, Forschungszentrum Desden-Rossendorf e.V. ; 515},
address = { Dresden },
url = { http://slubdd.de/katalog?TN_libero_mab2 }
}
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