@book
{TN_libero_mab2,
author = {
Güttler, Dominik
},
title = {
An investigation of target poisoning during reactive magnetron sputtering
},
publisher = {Forschungszentrum Dresden-Rossendorf},
keywords = {
Hochschulschrift
,
Forschungsbericht
},
year = {2009},
booktitle = {Wissenschaftlich-technische Berichte / FZD, Forschungszentrum Desden-Rossendorf e.V. ; 515},
address = {
Dresden
},
url = {
http://slubdd.de/katalog?TN_libero_mab2
}
}