author = { Wilke, Marcus AND Teichert, Gerd AND Gemma, Ryota AND Pundt, Astrid AND Kirchheim, Reiner AND Romanus, Henry AND Schaaf, Peter },

title = { Glow discharge optical emission spectroscopy for accurate and well resolved analysis of coatings and thin films },

publisher = {Elsevier BV},

isbn = {0040-6090},

keywords = { Materials Chemistry , Metals and Alloys , Surfaces, Coatings and Films , Surfaces and Interfaces , Electronic, Optical and Magnetic Materials },

year = {2011},

url = { http://slubdd.de/katalog?TN_libero_mab2 }