@misc
{TN_libero_mab2,
author = {
Arens, Winfried
AND
Ristau, Detlev
AND
Ullmann, Jens
AND
Zaczek, Christoph
AND
Thielsch, Roland
AND
Kaiser, Norbert
AND
Duparre, Angela
AND
Apel, Oliver
AND
Mann, Klaus R.
AND
Lauth, Hans
AND
Bernitzki, Helmut
AND
Ebert, Johanes
AND
Schippel, Stefan
AND
Heyer, H.
},
title = {
Properties of fluoride DUV excimer laser optics: influence of the number of dielectric layers
},
publisher = {SPIE},
isbn = {0277-786X},
year = {2000},
url = {
http://slubdd.de/katalog?TN_libero_mab2
}
}