%0 Generic
%T Properties of fluoride DUV excimer laser optics: influence of the number of dielectric layers
%A Arens, Winfried
%A Ristau, Detlev
%A Ullmann, Jens
%A Zaczek, Christoph
%A Thielsch, Roland
%A Kaiser, Norbert
%A Duparre, Angela
%A Apel, Oliver
%A Mann, Klaus R.
%A Lauth, Hans
%A Bernitzki, Helmut
%A Ebert, Johanes
%A Schippel, Stefan
%A Heyer, H.
%I SPIE
%@ 0277-786X
%D 2000
%C SPIE
%U http://slubdd.de/katalog?TN_libero_mab2
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