%0 Generic
%T Non-destructive detection of sub-micrometer-sized micropipes in silicon carbide using mirror electron microscope
%A Kobayashi, Keisuke
%A Mori, Yuki
%A Konishi, Kumiko
%A Hasegawa, Masaki
%A Kobayashi, Kenji
%A Shima, Akio
%I AIP Publishing
%@ 0021-8979
%@ 1089-7550
%K General Physics and Astronomy
%D 2023
%C AIP Publishing
%U http://slubdd.de/katalog?TN_libero_mab2
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