%0
Generic
%T
Fabrication of elliptical mirror at nanometer-level accuracy for hard x-ray focusing by numerically controlled plasma chemical vaporization machining
%A Yamamura, Kazuya
%A Yamauchi, Kazuto
%A Mimura, Hidekazu
%A Sano, Yasuhisa
%A Saito, Akira
%A Endo, Katsuyoshi
%A Souvorov, Alexei
%A Yabashi, Makina
%A Tamasaku, Kenji
%A Ishikawa, Tetsuya
%A Mori, Yuzo
%I AIP Publishing
%@ 0034-6748
%@ 1089-7623
%K Instrumentation
%D 2003
%C AIP Publishing
%U http://slubdd.de/katalog?TN_libero_mab2