author = { Omura, Y. AND Izumi, K. },

title = { Physical background of substrate current characteristics and hot-carrier immunity in short-channel ultrathin-film MOSFET's/SIMOX },

publisher = {Institute of Electrical and Electronics Engineers (IEEE)},

isbn = {0018-9383},

keywords = { Electrical and Electronic Engineering , Electronic, Optical and Magnetic Materials },

year = {1994},

url = { http://slubdd.de/katalog?TN_libero_mab2 }