TY -
BOOK
AU - Andersen, Hans Henrik
TI -
Sputtering by particle bombardment
1 Physical sputtering of single-element solids / with contrib. by H. H. Andersen ...
PB - Springer
SN - 3540105212
SN - 0387105212
PY - 1981
BT - Topics in applied physics ; 47
CY - Berlin
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -