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  1. Koehler, Michael [Author] ; Köhler, Michael [Other]; Wiegand, Antje [Other]

    Etching in microsystem technology

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    Weinheim [u.a.]: Wiley-VCH, 1999

  2. Koehler, Michael [Author] ; Köhler, Michael [Other]

    Ätzverfahren für die Mikrotechnik

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    Weinheim; New York; Chichester; Brisbane; Singapore; Toronto: Wiley-VCH, 1998

  3. Steigerwald, Joseph M. [Author]; Murarka, Shyam P. [Author]; Gutmann, Ronald J. [Author]

    Chemical mechanical planarization of microelectronic materials

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    New York; Chichester; Weinheim [u.a.]: J. Wiley, 1997

    Published in: A Wiley-Interscience publication

  4. Nemanich, Robert J. [Editor] ; Materials Research Society, Spring Symposium on Chemical Surface Preparation, Passivation and Cleaning for Semiconductor Growth and Processing 1992 San Francisco, Calif, Symposium on Chemical Surface Preparation, Passivation and Cleaning for Semiconductor Growth and Processing 1992 San Francisco, Calif

    Chemical surface preparation, passivation and cleaning for semiconductor growth and processing : symposium held April 27 - 29, 1992, San Francisco, California, U.S.A

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    Pittsburgh, Pa: Materials Research Society, 1992

    Published in: Materials Research Society: Materials Research Society symposium proceedings ; 25900

  5. Chemical vapor deposition of refractory metals and ceramics / [1], Symposium held November 29 - December 1, 1989, Boston, Massachusetts, U.S.A

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    Pittsburg, Pa.: Materials Research Society, 1990

    Published in: Chemical vapor deposition of refractory metals and ceramics / ed.: Theodore M. Besmann ... ; [1] - Materials Research Society: Materials Research Society symposium proceedings ; 168

  6. Walker, Perrin [Editor] ; Chemical Rubber Company Cleveland, Ohio

    CRC handbook of metal etchants

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    Boca Raton [u.a.]: CRC Press, 1991