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  1. Davim, J. Paulo [Editor]; Jackson, Mark J. [Other]

    Nano and micromachining

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    London: ISTE, 2009 ; Hoboken, NJ: John Wiley & Sons [u.a.], 2009

  2. Sedky, Sherif [Author]

    Post-processing techniques for integrated MEMS

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    Boston, Mass.; London: Artech House, c2006

    Published in: Artech House microelectromechanical systems series