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  1. Nabholz, Ulrike [Author] ; Mehner, Jan [Degree supervisor]; Mehner, Jan [Other]; Bechtold, Tamara [Other] Universitätsbibliothek

    Physical Modelling and Identification of Nonlinear Effects in Microelectromechanical Systems

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    Chemnitz: Universitätsverlag Chemnitz; Chemnitz: Technische Universität Chemnitz, 2021