Media type: Book Title: Principles of lithography Contributor: Levinson, Harry J. [Author] imprint: Bellingham, Wash.: Spie Press, 2010 Published in: SPIE: SPIE press monograph ; 198 Issue: 3. ed. Extent: XIV, 504 S.; Ill., graph Darst Language: English ISBN: 9780819483249 RVK notation: ZN 4170 : Fotolithographie; Maskierung (Elektronenstrahllithographie; Röntgenstrahllithographie) Keywords: Lithografie Lithografie Integrierte Schaltung Lithografie Origination: Footnote: Includes bibliographical references and index
Departmental Library DrePunct – open access area Shelf-mark: ZN 4170 L665(3) Item ID: 32994810 Status: Loanable