Media type: E-Article Title: Design and electro-thermal analysis of surface micromachined perforated membrane hotplate for chemical gas sensor applications Contributor: Kumar, Amit; Eranna, Golla imprint: Springer Science and Business Media LLC, 2016 Published in: Microsystem Technologies Language: English DOI: 10.1007/s00542-015-2646-9 ISSN: 0946-7076; 1432-1858 Keywords: Electrical and Electronic Engineering ; Hardware and Architecture ; Condensed Matter Physics ; Electronic, Optical and Magnetic Materials Origination: Footnote: