Cho, Chun-Hyung;
Jaeger, Richard C.;
Suhling, Jeffrey C.
Evaluation of the Temperature Dependence of the Combined Piezoresistive Coefficients of (111) Silicon Utilizing Chip-on-Beam and Hydrostatic Calibration
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Media type:
E-Article
Title:
Evaluation of the Temperature Dependence of the Combined Piezoresistive Coefficients of (111) Silicon Utilizing Chip-on-Beam and Hydrostatic Calibration
Contributor:
Cho, Chun-Hyung;
Jaeger, Richard C.;
Suhling, Jeffrey C.
imprint:
Korean Physical Society, 2008
Published in:Journal of the Korean Physical Society