Media type: E-Article Title: Materials Science Forum: Electrical Properties of Aluminium Oxide Films Grown by Atomic Layer Deposition on n-Type 4H-SiC Contributor: Avice, Marc; Grossner, Ulrike; Monakhov, Edouard V.; Grillenberger, Joachim; Nilsen, Ola; Fjellvåg, Helmer; Svensson, B.G. imprint: Trans Tech Publications Ltd., 2005 Published in: Materials Science Forum Language: Not determined DOI: 10.4028/0-87849-963-6.705 ISSN: 0255-5476 Origination: Footnote: