• Medientyp: E-Artikel
  • Titel: In situ dc oxygen-discharge cleaning system for optical elements
  • Beteiligte: Koide, Tsuneharu; Shidara, Tetsuo; Tanaka, Kenichiro; Yagishita, Akira; Sato, Shigeru
  • Erschienen: AIP Publishing, 1989
  • Erschienen in: Review of Scientific Instruments
  • Sprache: Englisch
  • DOI: 10.1063/1.1140869
  • ISSN: 0034-6748; 1089-7623
  • Schlagwörter: Instrumentation
  • Entstehung:
  • Anmerkungen:
  • Beschreibung: <jats:p>I n situ dc oxygen-discharge cleaning arrangements have been developed at the Photon Factory for the removal of carbon contamination from optical surfaces. A high cleaning rate could be achieved by producing an oxygen plasma close to the optical elements with special care taken to avoid any harmful effects from the discharge; contaminant carbon was completely removed within a few hours, at most. This short exposure time and the use of dry oxygen gas resulted in a restoration of the original ultrahigh vacuum without a bakeout. Results with a Seya-Namioka beamline for gas-phase experiments showed a flux enhancement amounting to a factor of 50, and results with a grasshopper beamline showed a nearly complete recovery of the light intensity, even at the carbon K edge.</jats:p>