Measuring the thickness of thin sintered layers precisely : Considering the influence of sintering on optical constants, the thickness of sintered Al2O3 layers in quartz tubes can be accurately determined
: Considering the influence of sintering on optical constants, the thickness of sintered Al<sub>2</sub>O<sub>3</sub> layers in quartz tubes can be accurately determined
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E-Artikel
Titel:
Measuring the thickness of thin sintered layers precisely : Considering the influence of sintering on optical constants, the thickness of sintered Al2O3 layers in quartz tubes can be accurately determined
:
Considering the influence of sintering on optical constants, the thickness of sintered Al<sub>2</sub>O<sub>3</sub> layers in quartz tubes can be accurately determined
Beschreibung:
<jats:title>Abstract</jats:title><jats:p>Optical thickness determination with miniaturized spectrometers is a commonly used technique that works quite well in many applications. For sintered materials however, this technique must be extended by the determination of the optical constants of the sintered material. This can be done using a combination of scanning electron microscopy and effective medium approaches. In this article, we demonstrate this for the optical thickness determination of sintered Al<jats:sub>2</jats:sub>O<jats:sub>3</jats:sub> layers in quartz tubes.</jats:p>