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Medientyp:
E-Artikel
Titel:
Comparative study on the specimen thickness measurement using EELS and CBED methods
Beteiligte:
Heo, Yoon-Uk
Erschienen:
Springer Science and Business Media LLC, 2020
Erschienen in:Applied Microscopy
Sprache:
Englisch
DOI:
10.1186/s42649-020-00029-4
ISSN:
2287-4445
Entstehung:
Anmerkungen:
Beschreibung:
<jats:title>Abstract</jats:title><jats:p>Two thickness measurement methods using an electron energy loss spectroscopy (EELS) and 10a convergent beam electron diffraction (CBED) were compared in an Fe-18Mn-0.7C alloy. The thin foil specimen was firstly tilted to satisfy 10a two-beam condition. Low loss spectra of EELS and CBED patterns were acquired in scanning transmission electron microscopy (STEM) and TEM-CBED modes under the two-beam condition. The log-ratio method was used for measuring the thin foil thickness. Kossel-Möllenstedt (K-M) fringe of the <jats:inline-formula><jats:alternatives><jats:tex-math>$$ \mathbf{13}\overline{\mathbf{1}} $$</jats:tex-math><mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML"><mml:mn>13</mml:mn><mml:mover><mml:mn>1</mml:mn><mml:mo>¯</mml:mo></mml:mover></mml:math></jats:alternatives></jats:inline-formula> diffracted disk of austenite was analyzed to evaluate the thickness. The results prove the good coherency between both methods in the thickness range of 72 ~ 113 nm with a difference of less than 5%.</jats:p>