Hofmann, Matthias;
Gemming, Thomas;
Menzel, Siegfried;
Wetzig, Klaus
Microstructure of Al/Ti Metallization Layers : Dedicated to Professor Dr. Dr. h. c. Manfred Rühle on the Occasion of his 65th Birthday
: Dedicated to Professor Dr. Dr. h. c. Manfred Rühle on the Occasion of his 65th Birthday
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E-Artikel
Titel:
Microstructure of Al/Ti Metallization Layers : Dedicated to Professor Dr. Dr. h. c. Manfred Rühle on the Occasion of his 65th Birthday
:
Dedicated to Professor Dr. Dr. h. c. Manfred Rühle on the Occasion of his 65th Birthday
Beteiligte:
Hofmann, Matthias;
Gemming, Thomas;
Menzel, Siegfried;
Wetzig, Klaus