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Bornemann, Steffen [Author]; Gülink, Jan [Author]; Moro, Victor [Author]; Canals, Joan [Author]; Wolter, Stefan [Author]; Schöttler, Georg [Author]; Bezshlyakh, Daria [Author]; Prades, Joan Daniel [Author]; Dieguez, Angel [Author]; Waag, Andreas [Author]

Processing and characterization of monolithic passive-matrix GaN-based microLED arrays with pixel sizes from 5 to 50 um

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  • Media type: E-Book; Special Print
  • Title: Processing and characterization of monolithic passive-matrix GaN-based microLED arrays with pixel sizes from 5 to 50 um
  • Contributor: Bornemann, Steffen [VerfasserIn]; Gülink, Jan [VerfasserIn]; Moro, Victor [VerfasserIn]; Canals, Joan [VerfasserIn]; Wolter, Stefan [VerfasserIn]; Schöttler, Georg [VerfasserIn]; Bezshlyakh, Daria [VerfasserIn]; Prades, Joan Daniel [VerfasserIn]; Dieguez, Angel [VerfasserIn]; Waag, Andreas [VerfasserIn]
  • imprint: [Piscataway Township, NJ]: IEEE, 2021
  • Published in: IEEE Photonics Journal ; Volume: 13, Issue: 5
  • Extent: 1 Online-Ressource
  • Language: English
  • DOI: 10.1109/JPHOT.2021.3106584
  • Identifier:
  • Origination:
  • Footnote:
  • Description: MicroLED arrays with the capability of switching each pixel separately with high frequency can serve as structured micro-illumination light engines for applications in sensing, optogenetics, microscopy and many others. We describe a scalable chip process chain for the fabrication of passive-matrix microLED arrays, which were integrated with PCB-based driving electronics. The arrays were produced by deep-etching of conventional planar LED structures on sapphire, followed by filling and planarization steps. The pixel resolution lies in the range of 254 to 2540 pixels-per-inch (ppi), the arrays consist of 32 x 32 pixels. Optical output powers up to 50 μW per pixel were measured. In comparison to CMOS-based approaches, the presented technology is a simplified strategy to producemicroLED arrays with high pixel counts.
  • Access State: Open Access