Media type: Electronic Conference Proceeding Title: Surface Gradient Integrated Profiler for X-ray and EUV Optics—Calibration of the rotational angle error of the rotary encoders Contributor: Higashi, Yasuo; Takaie, Yuichi; Endo, Katsuyoshi; Kume, Tatsuya; Enami, Kazuhiro; Yamauchi, Kazuto; Yamamura, Kazuya; Sano, Yasuhisa; Ueno, Kenji; Mori, Yuzo imprint: AIP, 2007 Published in: AIP Conference Proceedings Extent: Language: Not determined DOI: 10.1063/1.2436165 ISSN: 0094-243X Origination: Footnote: