• Media type: E-Article
  • Title: Fabrication of tunable diffraction grating by imprint lithography with photoresist mold
  • Contributor: Yamada, Itsunari; Ikeda, Yusuke; Higuchi, Tetsuya
  • imprint: AIP Publishing, 2018
  • Published in: Review of Scientific Instruments
  • Language: English
  • DOI: 10.1063/1.4995449
  • ISSN: 0034-6748; 1089-7623
  • Keywords: Instrumentation
  • Origination:
  • Footnote:
  • Description: <jats:p>We fabricated a deformable transmission silicone [poly(dimethylsiloxane)] grating using a two-beam interference method and imprint lithography and evaluated its optical characteristics during a compression process. The grating pattern with 0.43 μm depth and 1.0 μm pitch was created on a silicone surface by an imprinting process with a photoresist mold to realize a simple, low-cost fabrication process. The first-order diffraction transmittance of this grating reached 10.3% at 632.8 nm wavelength. We also measured the relationship between the grating period and compressive stress to the fabricated elements. The grating period changed from 1.0 μm to 0.84 μm by 16.6% compression of the fabricated element in one direction, perpendicular to the grooves, and the first-order diffraction transmittance was 8.6%.</jats:p>