Media type: E-Article Title: Ion-Implantation-Induced Damage Characteristics Within AlN and Si for GaN-on-Si Epitaxy Contributor: Leathersich, Jeffrey M.; Tungare, Mihir; Weng, Xiaojun; Suvarna, Puneet; Agnihotri, Pratik; Evans, Morgan; Redwing, Joan; Shahedipour-Sandvik, F. imprint: Springer Science and Business Media LLC, 2013 Published in: Journal of Electronic Materials Language: English DOI: 10.1007/s11664-013-2491-5 ISSN: 0361-5235; 1543-186X Keywords: Materials Chemistry ; Electrical and Electronic Engineering ; Condensed Matter Physics ; Electronic, Optical and Magnetic Materials Origination: Footnote: