• Medientyp: E-Artikel
  • Titel: Fabrication of elliptically figured mirror for focusing hard x rays to size less than 50nm
  • Beteiligte: Yumoto, Hirokatsu; Mimura, Hidekazu; Matsuyama, Satoshi; Hara, Hideyuki; Yamamura, Kazuya; Sano, Yasuhisa; Ueno, Kazumasa; Endo, Katsuyoshi; Mori, Yuzo; Yabashi, Makina; Nishino, Yoshinori; Tamasaku, Kenji; Ishikawa, Tetsuya; Yamauchi, Kazuto
  • Erschienen: AIP Publishing, 2005
  • Erschienen in: Review of Scientific Instruments
  • Sprache: Englisch
  • DOI: 10.1063/1.1922827
  • ISSN: 0034-6748; 1089-7623
  • Schlagwörter: Instrumentation
  • Entstehung:
  • Anmerkungen:
  • Beschreibung: <jats:p>In this study, we designed, fabricated, and evaluated a hard x-ray focusing mirror having an ideally focused beam with a full width at half maximum in the intensity profile of 36nm at an x-ray energy of 15keV. The designed elliptically curved shape was fabricated by a computer-controlled fabrication system using plasma chemical vaporization machining and elastic emission machining, on the basis of surface profiles accurately measured by combining microstitching interferometry with relative angle determinable stitching interferometry. A platinum-coated surface was employed for hard x-ray focusing with a large numerical aperture. Line-focusing tests on the fabricated elliptical mirror are carried out at the 1-km-long beamline of SPring-8. A full width at half maximum of 40nm was achieved in the focused beam intensity profile under the best focus conditions.</jats:p>