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  1. Hu, Xiao [Author] ; Schulz, Stefan E. [Degree supervisor]; Schulz, Stefan E. [Other]; Bartha, Johann W. [Other]; Elliott, Simon D. [Other]

    Multiscale Simulation of Metallic Copper and Copper Oxide Atomic Layer Deposition from Cu Beta-diketonates

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    Chemnitz: Universitätsverlag der Technischen Universität Chemnitz; Chemnitz: Technische Universität Chemnitz, 2018