Media type: Book; Thesis Title: An investigation of target poisoning during reactive magnetron sputtering Contributor: Güttler, Dominik [Author] imprint: Dresden: Forschungszentrum Dresden-Rossendorf, 2009 Published in: Forschungszentrum Dresden-Rossendorf: Wissenschaftlich-technische Berichte / FZD, Forschungszentrum Dresden-Rossendorf ; 515 Extent: V, 112 S.; Ill., graph. Darst Language: English RVK notation: UP 7550 : Herstellung dünner Schichten incl. Epitaxie-Schichten, Dünnschichttechnik Keywords: Hochschulschrift ; Forschungsbericht Origination: University thesis: Zugl.: Dresden, Techn. Univ., Fak. Mathematik und Naturwissenschaften, Diss., 2009 Footnote:
Central Library – stack Shelf-mark: 2009 4 007632 Item ID: 31486066 Status: Loanable, place order > Ordering possible ‒ please log in
Central Library – stack Shelf-mark: 2009 4 007630 Item ID: 31486067 Status: Place order for use in library, no dispatch by interlibrary loan; delivery of photocopies possible > Ordering possible ‒ please log in