• Media type: Book
  • Title: Introduction to spectroscopic ellipsometry of thin film materials : instrumentation, data analysis, and applications
  • Contributor: Wee, Andrew T. S. [VerfasserIn]; Yin, Xinmao [VerfasserIn]; Tang, Chi Sin [VerfasserIn]
  • Corporation: Wiley-VCH
  • imprint: Weinheim: Wiley-VCH, [2022]
  • Extent: x, 187 Seiten; Illustrationen; 24.4 cm x 17 cm
  • Language: English
  • ISBN: 9783527349517; 3527349510
  • Publisher, production or purchase order numbers: Sonstige Nummer: 1134951 000
  • RVK notation: UP 7500 : Allgemeines
  • Keywords: Ellipsometrie > Dünne Schicht
  • Origination:
  • Footnote:

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  • Status: Loanable