Media type: Electronic Conference Proceeding Title: Development of plasma chemical vaporization machining and elastic emission machining systems for coherent x-ray optics Contributor: Mori, Yuzo; Yamauchi, Y.; Yamamura, Kazuya; Mimura, Hidekazu; Saito, A.; Kishimoto, H.; Sekito, Y.; Kanaoka, Masahiko; Souvorov, Alexei; Yabashi, Makina; Tamasaku, Kenji; Ishikawa, Tetsuya imprint: SPIE, 2001 Published in: SPIE Proceedings Extent: Language: Not determined DOI: 10.1117/12.448496 ISSN: 0277-786X Origination: Footnote: