Media type: E-Article Title: Silicon Carbide and Related Materials 2005: High Temperature Annealing Study of Al2O3 Deposited by ALCVD on n-Type 4H-SiC Contributor: Avice, Marc; Grossner, Ulrike; Nilsen, Ola; Christensen, Jens S.; Fjellvåg, Helmer; Svensson, B.G. imprint: Trans Tech Publications Ltd., 2006 Published in: Silicon Carbide and Related Materials 2005 Language: Not determined DOI: 10.4028/0-87849-425-1.1067 ISSN: 0255-5476 Origination: Footnote: