Media type: Electronic Conference Proceeding Title: An analytical electrothermal model of a 1D electrothermal MEMS micromirror Contributor: Todd, Shane T.; Xie, Huikai imprint: SPIE, 2005 Published in: Smart Structures, Devices, and Systems II Extent: Language: Not determined DOI: 10.1117/12.582136 ISSN: 0277-786X Origination: Footnote: