Media type: Electronic Conference Proceeding Title: Fundamental limits of optical critical dimension metrology: a simulation study Contributor: Silver, Richard; Germer, Thomas; Attota, Ravikiran; Barnes, Bryan M.; Bunday, Benjamin; Allgair, John; Marx, Egon; Jun, Jay imprint: SPIE, 2007 Published in: SPIE Proceedings Extent: Language: Not determined DOI: 10.1117/12.716604 ISSN: 0277-786X Origination: Footnote: